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doonfesuto tyaaruzu
doonfesuto tyaaruzu
Materials science
Chemical engineering
Substrate (chemistry)
Plasma-enhanced chemical vapor deposition
Oxide
3
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A substrate support for shielded process chamber
1997
zao jun
doonfesuto tyaaruzu
tyan furanku
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Plasma enhanced chemical vapor deposition substrate processing Chiyanba
1995
ee . baakau kureigu
doonfesuto tyaaruzu
ee . fodaa maaku
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Improved aluminum coating
1994
Craig Bercaw
Charles Dornfest
Mark Fodor
Fred C. Redeker
H. Steven Tomozawa
suteiivun tomozawa eiti
burekoo kureigu
doonfesuto tyaaruzu
sii . redekaa fureddo
ansonii fodoo maaku
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