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Thomas Witters
Thomas Witters
Oxide
Ternary operation
High-κ dielectric
Chemical vapor deposition
Thin film
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Ternary rare-earth metal oxide high-k layers on silicon oxide
2005
Applied Physics Letters
Chao Zhao
Thomas Witters
Bert Brijs
Hugo Bender
O. Richard
Matty Caymax
Tassilo Heeg
Jürgen Schubert
Valeri Afanas'ev
Andre Stesmans
Darrell G. Schlom
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