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K. Tapily
K. Tapily
Electronic engineering
Atomic layer deposition
Annealing (metallurgy)
Materials science
Titanium
2
Papers
17
Citations
0
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Impact of Slot Plane Antenna Annealing on Carrier Transport Mechanism and Reliability on ZrO 2 /Al 2 O 3 /Ge Gate Stack
2017
IEEE Transactions on Device and Materials Reliability
Yiming Ding
D. Misra
K. Tapily
R.D. Clark
S Consiglio
Cory Wajda
Gert Leusink
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Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal
2017
IITC | International Interconnect Technology Conference
S-A. Chew
H. Yu
Marc Schaekers
Steven Demuynck
G. Mannaert
Eddy Kunnen
Erik Rosseel
Andriy Hikavyy
A. Dangol
K. De Meyer
D. Mocuta
Naoto Horiguchi
Gert Leusink
Cory Wajda
Takahiro Hakamata
Toshio Hasegawa
K. Tapily
R S Clark
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Citations (16)
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