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A. Saitoh
A. Saitoh
Kyoto University
Radiochemistry
p–n diode
Metallurgy
Ion implantation
Ion
1
Papers
4
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Formation of deep pn junctions by MeV Al- and B-ion implantations into 4H-SiC and reverse characteristics
2000
Materials Science Forum
Nao Miyamoto
A. Saitoh
Tsunenobu Kimoto
Hiroyuki Matsunami
Y. Hishida
Masanori Watanabe
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Citations (4)
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