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E. Salmon
E. Salmon
Centre national de la recherche scientifique
Ion implantation
Ion beam
Thin film
Sputtering
Ion beam deposition
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YBaCuO thin films deposited by ion beam sputtering assisted by implantation of: O, Ne, Ar, Cu, Kr, Xe and Ba
1993
Journal of Alloys and Compounds
R.J. Gaboriaud
E. Salmon
S. Benayoun
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