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Sven Burger
Sven Burger
German National Metrology Institute
Optics
Extreme ultraviolet
Scattering
Grazing-incidence small-angle scattering
Ray
4
Papers
13
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Determination of line profiles on photomasks using DUV, EUV and X-ray scattering
2014
Frank Scholze
Bernd Bodermann
Sven Burger
Johannes Endres
Anton Haase
Michael Krumrey
Christian Laubis
Victor Soltwisch
Albrecht Ullrich
Jan Wernecke
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Citations (4)
Joint Research on Scatterometry and AFM Wafer Metrology
2011
Bernd Bodermann
Egbert Buhr
Hans-Ulrich Danzebrink
Markus Bär
Frank Scholze
Michael Krumrey
Matthias Wurm
Petr Klapetek
Poul Erik Hansen
Virpi Korpelainen
Marijn van Veghel
Andrew Yacoot
Samuli Siitonen
Omar El Gawhary
Sven Burger
Toni Saastamoinen
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Citations (6)
1