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Souichi Mashino
Souichi Mashino
Kanagawa Institute of Technology
Plasma
Radical
Analytical chemistry
Cathode
Chemistry
2
Papers
16
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Effects of Fluorocarbon Films on CF Radical in CF4/H2 Plasma
1999
Japanese Journal of Applied Physics
Toshihiko Arai
Miki Goto
Keita Horikoshi
Souichi Mashino
Satoshi Aikyo
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Citations (16)
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