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Kyuhong Lim
Kyuhong Lim
SEMATECH
Metrology
Optoelectronics
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2
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1
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Defect metrology challenges for the 45-nm technology node and beyond
2006
Dilip Patel
Jeffrey Hanrahan
Kyuhong Lim
Milton Godwin
Peter Figliozzi
Dale Sheu
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