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Alexander Hirsch
Alexander Hirsch
Infineon Technologies
Wafer
Scanning electron microscope
Sputter deposition
Ion beam
Cleanroom
2
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12
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In-line failure analysis on productive wafers with dual-beam SEM/FIB systems
2001
R. Weiland
Christian Boit
Nick Dawes
Andreas Dziesiaty
Ernst Demm
Bernd Ebersberger
L. Frey
Stefan Geyer
Alexander Hirsch
C. Lehrer
Peter Meis
Matthias Kamolz
Henri Lezec
Hans Rettenmaier
Wolfgang Tittes
Rolf Treichler
Harald Zimmermann
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Citations (9)
Wafer Conserving Full Range Construction Analysis for IC Fabrication and Process Development Based on FIB/Dual Beam Inline Application
2000
R. Weiland
Christian Boit
Bernd Ebersberger
P. Meis
N. Dawes
A. Dziesiaty
H. Zimmermann
Ernst Demm
Alexander Hirsch
L. Frey
C. Lehrer
S. Geyer
M. Kamolz
H. Rettenmaier
W. Tittes
H. Lezec
Rolf Treichler
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Citations (3)
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