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Eui Kyoon Kim

University of Texas at Austin

15

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335

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Implementation of an imprint damascene process for interconnect fabrication

2006 Journal of Vacuum Science & Technology B
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Study of the kinetics of step and flash imprint lithography photopolymerization

2005 Aiche Journal
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Vinyl ether formulations for step and flash imprint lithography

2005 Journal of Vacuum Science & Technology B
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Importance of evaporation in the design of materials for step and flash imprint lithography

2005 Journal of Vacuum Science & Technology B
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Tailoring photopolymerization materials for nanotechnology

2004
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