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S Watcham
S Watcham
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Materials science
Electronic engineering
Microelectromechanical systems
Etching
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Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
2003
International Conference on Solid-State Sensors, Actuators and Microsystems
Heiko Stahl
Arnim Hoechst
Frank Fischer
Lars Metzger
Ralf Reichenbach
Franz Laermer
Silvia Kronmueller
K Breitschwerdt
R. Gunn
S Watcham
Cristina Rusu
Ann Witvrouw
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ADVANCES IN DEEP OXIDE ETCH PROCESSING FOR MEMS – MASK SELECTION
2000
Semiotica
Jyoti Kiron Bhardwaj
C. Welch
A. Barker
R. Gunn
Leslie Michael Lea
S Watcham
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Advances in High Rate Silicon and Oxide Etching Using ICP
1999
Harbans L. Bhardwaj
Hasan Ashraf
James Hopkins
Ian D. Johnston
Sue McAuley
S Hall
Geoff K. Nicholls
Lilian Atabo
Alan Michael Hynes
Curt Welch
Sandra Barker
Bahar Gun
Leslie Michael Lea
E. Guibana
S Watcham
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