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R Segler
R Segler
Bielefeld University
Analytical chemistry
Microstructure
Reactive-ion etching
Plasma
Optics
2
Papers
12
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Reactive ion etching with end point detection of microstructured Mo/Si multilayers by optical emission spectroscopy
2000
Microelectronic Engineering
L Dreeskornfeld
R Segler
G. Haindl
O. Wehmeyer
S Rahn
E Majkova
Ulf Kleineberg
Ulrich Heinzmann
P. Hudek
I. Kostic
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Citations (10)
Application of Reactive Ion Etching to the Fabrication of Microstructure on Mo/Si Multilayer
1999
Chinese Physics Letters
Zc Le
L Dreeskornfeld
S Rahn
R Segler
Ulf Kleineberg
Ulrich Heinzmann
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Citations (2)
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