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Stacia L. Marcelynas
Stacia L. Marcelynas
Varian Semiconductor
Wafer
Doping
Optoelectronics
Semiconductor
Plasma
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Next Generation Plasma Doping: First Results of a Heated E-chuck
2018
Aseem K. Srivastava
Deven Raj
Vijay D. Parkhe
Steven M. Anella
Stacia L. Marcelynas
Yong Sun
Jung Chan Lee
Praket P. Jha
Jingmei Liang
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