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Sanjit Kumar Das
Sanjit Kumar Das
IBM
Copper interconnect
Materials science
Dielectric
Electronic engineering
Lithography
4
Papers
62
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Dual damascene ash development for a VFTL of target k=2.0 integration
2005
Microelectronic Engineering
Brian White
Andreas Knorr
Ward Engbrecht
Bernd Kastenmeier
Sanjit Kumar Das
Ricky McGowan
Sri Satyanarayana
Michael Gallagher
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Citations (9)
Evaluation of the Chemical-mechanical Planarization (CMP) Performance of Silicon Nitride and Silicon Carbide as Hard Mask Materials for Cu-based Interconnect Technology
2002
Wei-Tsu Tseng
Jia Lee
Sanjit Kumar Das
John A. Fitzsimmons
Glenn A. Biery
Edward Paul Barth
Ronald Goldblatt
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