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Koichi Izumi

Business International Corporation

7

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Synthesis of silicon dioxide film using high-concentration ozone and evaluation of the film quality

2005 Journal of Electronic Materials
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Enabling single-wafer low temperature radical oxidation

2005 RTP | International Conference on Advanced Thermal Processing of Semiconductors
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Explosion properties of highly concentrated ozone gas

2005 Journal of Loss Prevention in The Process Industries
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Fabrication of SOI Films with High Crystal Uniformity by High-Speed Zone-Melting Crystallization

2003 Journal of The Electrochemical Society
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Fabrication of silicon thin films with defects below detection limit of electron spin resonance for solar cells by high-speed zone-melting crystallization of amorphous silicon

2001 Applied Physics Letters
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