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F. Bertin

STMicroelectronics

43

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Impact of plasma reactive ion etching on low dielectric constant porous organosilicate films' microstructure and chemical composition

2016 Microporous and Mesoporous Materials
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Predicting Adsorption on Bare and Modified Silica Surfaces

2015 Journal of Physical Chemistry C
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Study of the La-related dipole in TiN/LaOx/HfSiON/SiON/Si gate stacks using hard X-ray photoelectron spectroscopy and backside medium energy ion scattering

2015 Applied Surface Science
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Functionalization of Silica Nanoparticles and Native Silicon Oxide with Tailored Boron-Molecular Precursors for Efficient and Predictive p-Doping of Silicon

2015 Journal of Physical Chemistry C
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Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data

2015 Microporous and Mesoporous Materials
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Engineering the size and density of silicon agglomerates by controlling the initial surface carbonated contamination

2013 Applied Surface Science
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Deterministic placement of doping atoms on hydroxylated surfaces

2013 The Japan Society of Applied Physics
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Backside medium energy ion scattering study of the lanthanum diffusion in advanced gate stacks for the 32nm node

2013 Microelectronic Engineering
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Impact of high temperature annealing on La diffusion and flatband voltage (Vfb) modulation in TiN/LaOx/HfSiON/SiON/Si gate stacks

2012 Journal of Applied Physics
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High-resolution XPS spectromicroscopy study of micro-patterned gold–tin surfaces

2012 Applied Surface Science
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