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Meng Jie Xu
Meng Jie Xu
Shanghai University
Sputtering
Scanning electron microscope
Microstructure
Ceramic
Materials science
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Performance Optimization of AIN Films Using Self-Prepared AIN Target
2013
Key Engineering Materials
Xiao Yan Wang
Feng Gu
Meng Jie Xu
Tian Shi Shi
Yue Shen
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