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Yoshinori Minamide
Yoshinori Minamide
Hitachi
Digital signal processor
Analytical chemistry
Optics
Electron-beam lithography
Maskless lithography
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Mark detection in electron beam lithography using evaluation of wave signal symmetry
1993
Microelectronic Engineering
Genya Matsuoka
Teruo Iwasaki
Hiroyoshi Andou
Yoshinori Minamide
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