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Bruce K Libby
Bruce K Libby
Gas cluster ion beam
Materials science
Molecular physics
Dosimetry
Analytical chemistry
2
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The charge-and dosimetry system and method for a gas-cluster ion beam
2001
Michael E Mack
Bruce K Libby
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Apparatus for smooth substrates by means of gas-cluster ion beam
2000
Bruce K Libby
Isao Yamada
James A Greer
Lester G Crawford
James G Bachand
Matthew C. Gwinn
Richard P. Torti
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