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V. Sidorkin
V. Sidorkin
Delft University of Technology
Analytical chemistry
Resist
Materials science
Optics
Electron-beam lithography
3
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41
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Nanofabrication with a High Resolution Helium Ion Beam
2010
Microscopy and Microanalysis
E. van Veldhoven
V. Sidorkin
Ping Chen
Paul F. A. Alkemade
E. van der Drift
Hwm Huub Salemink
H.W. Zandbergen
D.J. Maas
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Citations (2)
Towards 2-10nm electron-beam lithography: A quantitative approach
2008
Microelectronic Engineering
V. Sidorkin
A.J. van Run
A.K. van Langen-Suurling
Anda E. Grigorescu
E. van der Drift
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Citations (11)
1