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Digh Hisamoto
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Fabrication
Chemical vapor deposition
Degradation
Annealing
Voltage
International System of Units
Low voltage
Field-effect transistor
Electrode
Impurity
Electron mobility
Capacitor
Very-large-scale integration
Silicon on insulator
CMOS
Redox
Etching
Threshold voltage
Capacitance
Short-channel effect
Dielectric
Lithography
Contact resistance
Silicon
Logic gate
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Fabrication
Chemical vapor deposition
Degradation
Annealing
Voltage
International System of Units
Low voltage
Field-effect transistor
Electrode
Impurity
Electron mobility
Capacitor
Very-large-scale integration
Silicon on insulator
CMOS
Redox
Etching
Threshold voltage
Capacitance
Short-channel effect
Dielectric
Lithography
Contact resistance
Silicon
Logic gate
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Digh Hisamoto
Hitachi
114
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